Indima Yokugaya Ngokunembile Ye-Brown Fused Alumina Micropowder Embonini Ye-Semiconductor
Bangani, namuhla sizokhuluma ngento enzima nelula ukuyisho—i-alumina micropowder ensundu ehlanganisiwe. Kungenzeka ukuthi awuzange uzwe ngakho, kodwa ama-chip abaluleke kakhulu futhi abucayi efonini yakho kanye newashi elihlakaniphile, ngaphambi kokuba akhiqizwe, kungenzeka ukuthi ayekuxazululile. Ukubiza ngokuthi “uchwepheshe wezinwele oyinhloko” we-chip akulona ihaba.
Ungakucabangi njengethuluzi eliqinile njengetshe lokugoqa. Ezweni lama-semiconductors, lidlala indima ebucayi njengomqophi omncane osebenzisa ama-scalpel amancane.
I. “Ukuqopha Ubuso” kweChip: Kungani Ukuqopha Kubalulekile?
Ake siqale siqonde into eyodwa: ama-chips awakhuli ngqo emhlabathini oyisicaba. “Akhiwe” ungqimba ngengqimba ku-wafer ye-silicon emsulwa kakhulu, eyisicaba (lokho esikubiza ngokuthi “i-wafer”), njengokwakha isakhiwo. Lesi “sakhiwo” sinezitezi eziningi, futhi umjikelezo wesitezi ngasinye mncane kunobukhulu bezinwele zomuntu obuyinkulungwane.
Ngakho-ke nansi inkinga: uma wakha isitezi esisha, uma isisekelo—ubuso besitezi sangaphambilini—singalingani ngisho nakancane, ngisho noma kukhona ukuvela okuncane njenge-athomu, kungabangela ukuthi isakhiwo sonke sigobe, singafinyeleli, futhi senze ama-chip angasebenzi. Ukulahlekelwa akulona ihlaya.
Ngakho-ke, ngemva kokuba isitezi ngasinye sesiqediwe, kumelwe senze “ukuhlanza” kanye “nokulinganisa.” Le nqubo inegama elihle: “Ukuhlelwa Kwemishini Yamakhemikhali,” okufushaniswe ngokuthi i-CMP. Nakuba igama lizwakala liyinkimbinkimbi, lesi simiso akunzima ukusiqonda: kuyinhlanganisela yokugqwala kwamakhemikhali kanye nokuhuzuka kwemishini.
“Ukubhoboza” kwamakhemikhali kusebenzisa uketshezi olukhethekile lokupholisha ukuze kuthambe futhi kugugule izinto ezizosuswa, okwenza kube “thambile” kakhudlwana.
"Ukubhoboza" komshini kuyaqala ukusebenza—i-corundum micropowder ensunduUmsebenzi wayo ukusebenzisa izindlela ezibonakalayo ukuze "ikhuhle" ngokunembile nangokulinganayo izinto "ezithambisiwe" yinqubo yamakhemikhali.
Ungase ubuze, njengoba kunezinhlobo eziningi kangaka zokubhula ezitholakalayo, kungani lokhu kukhethekile? Yilapho izimfanelo zayo ezivelele zingena khona.
II. “Impuphu Ene-Micronized Engafakwanga I-Micron Kangaka”: Ikhono Eliyingqayizivele Le-Alumina Ehlanganisiwe Ensundu
Embonini ye-semiconductor, i-alumina ensundu exutshwe nge-micronized powder esetshenziswayo akuyona into evamile. Iyunithi "yamandla akhethekile", ekhethwe ngokucophelela futhi yahlungwa.
Okokuqala, kunzima ngokwanele, kodwa hhayi ngokunganaki.I-alumina ensundu ehlanganisiweUbulukhuni bayo bulandela idayimane kuphela, bunele ukuphatha izinto ezisetshenziswa kakhulu njenge-silicon, i-silicon dioxide, ne-tungsten. Kodwa isihluthulelo ukuthi ubulukhuni bayo buyibulukhuni “obuqinile”. Ngokungafani nezinye izinto eziqinile (njengedayimane) eziphuka kalula futhi eziphuka kalula ngaphansi kwengcindezi, i-alumina ensundu ehlanganisiwe igcina ubuqotho bayo ngenkathi iqinisekisa amandla okusika, igwema ukuba “yinto ebhubhisayo.”
Okwesibili, usayizi wezinhlayiya zayo ezincane uqinisekisa ukusika ngokulinganayo. Leli yiphuzu elibaluleke kakhulu. Cabanga uzama ukupholisha i-jade eyigugu ngenqwaba yamatshe anobukhulu obuhlukahlukene. Amatshe amakhulu angashiya imigodi ejulile ngokungenakugwenywa, kuyilapho amancane engase abe mancane kakhulu ukusebenza kuwo. Ezinqubweni ze-CMP (Chemical Mechanical Polishing), lokhu akwamukeleki nhlobo. I-alumina micropowder ensundu ehlanganisiwe esetshenziswa kuma-semiconductors kumele ibe nokusatshalaliswa kosayizi wezinhlayiya omncane kakhulu. Lokhu kusho ukuthi cishe zonke izinhlayiya zilingana ngosayizi. Lokhu kuqinisekisa ukuthi izinkulungwane zezinhlayiya ze-micropowder zihamba ndawonye ebusweni be-wafer, zisebenzisa ingcindezi efanayo ukudala ubuso obungenasici, hhayi obunama-pockmarked. Lokhu kunemba kusezingeni le-nanometer.
Okwesithathu, iyi-ejenti "ethembekile" ngamakhemikhali. Ukukhiqiza ama-chip kusebenzisa amakhemikhali ahlukahlukene, okuhlanganisa izindawo ezine-acidic kanye ne-alkaline. I-alumina micropowder ensundu exutshwe kahle izinzile kakhulu ngamakhemikhali futhi ayisabelani kalula nezinye izingxenye oketshezini lokupholisha, ivimbela ukungeniswa kokungcola okusha. Kufana nesisebenzi esisebenza kanzima, esingenaso isithunzi—uhlobo lomuntu oluthandwa ngabaphathi (onjiniyela).
Okwesine, ukuma kwayo kuyalawuleka, kukhiqiza izinhlayiya "ezibushelelezi". I-alumina micropowder ethuthukisiwe ensundu ingalawula ngisho "nokuma" (noma "ukuma") kwezinhlayiya. Ngenqubo ekhethekile, izinhlayiya ezinemiphetho ebukhali zingaguqulwa zibe yizimo ezicishe zibe yindilinga noma ezi-polyhedral. Lezi zinhlayiya "ezibushelelezi" zinciphisa ngempumelelo umphumela "wokugoba" ebusweni be-wafer ngesikhathi sokusika, kunciphisa kakhulu ingozi yokuklwebheka.
III. Ukusetshenziswa Kwangempela: “Umjaho Othule” Kumugqa Wokukhiqiza we-CMP
Emgqeni wokukhiqiza we-CMP, ama-wafer abanjwe ngokuqinile endaweni yawo ngama-vacuum chucks, abekwe phezulu phansi, acindezelwe ephepheni lokupholisha elijikelezayo. Uketshezi lokupholisha oluqukethe i-alumina micropowder ensundu exutshwe lufuthwa njalo, njengenkungu encane, phakathi kwephepheni lokupholisha ne-wafer.
Kuleli qophelo, kuqala “umjaho onembile” ezweni elincane kakhulu. Izigidigidi zezinhlayiya ze-alumina micropowder ezinsundu ezihlanganisiwe, ngaphansi kwengcindezi nokujikeleza, zenza izigidi zezicucu ezingeni le-nanometer ngomzuzwana ebusweni be-wafer. Kumelwe zihambe ndawonye, njengebutho eliqeqeshwe kahle, ziqhubekela phambili kahle, “zilula” izindawo eziphakeme futhi “zishiye zingenalutho” izindawo eziphansi.
Yonke inqubo kumele ibe mnene njengomoya wasentwasahlobo, hhayi isiphepho esinamandla. Amandla amaningi angaklwebha noma adale imifantu emincane (ebizwa ngokuthi “umonakalo ongaphansi komhlaba”); amandla anganele aholela ekusebenzeni kahle okuphansi futhi aphazamise amashejuli okukhiqiza. Ngakho-ke, ukulawulwa okunembile kokuhlushwa, usayizi wezinhlayiya, kanye nesimo se-alumina micropowder ensundu ehlanganisiwe kunquma ngqo isivuno sokugcina se-chip kanye nokusebenza.
Kusukela ekupholisheni kokuqala okungaqinile kwama-wafer e-silicon, kuya ekupholisheni kwesendlalelo ngasinye sokuvikela (i-silicon dioxide), futhi ekugcineni kuya ekupholisheni ama-plug e-tungsten nezintambo zethusi ezisetshenziselwa ukuxhumanisa amasekethe, i-alumina micropowder ensundu exutshwe ibaluleke kakhulu cishe kuzo zonke izinyathelo ezibalulekile zokupholisheni. Ingena kuyo yonke inqubo yokukhiqiza ama-chip, "iqhawe elingemuva kwesithombe" ngempela.
IV. Izinselele Nekusasa: Akukho okungcono kakhulu, kungcono kuphela
Vele, le ndlela ayinasiphelo. Njengoba izinqubo zokukhiqiza ama-chip zithuthuka kusukela ku-7nm kanye no-5nm kuya ku-3nm ngisho nangosayizi omncane, izidingo zezinqubo ze-CMP zifinyelele ezingeni "elibi kakhulu". Lokhu kuletha izinselele ezinkulu nakakhulu ze-brown fused alumina micropowder:
Kuhle futhi kuyafana:Ama-micropowder esikhathi esizayokungadingeka ukuthi kufinyelelwe esikalini sama-nanometer angamashumi, kanye nokusatshalaliswa kosayizi wezinhlayiya okufanayo njengokungathi kuhlungwe yi-laser.
Isihlanzi: Noma yikuphi ukungcola kwe-ion yensimbi kuyabulala, okuholela ezidingweni zokuhlanzeka eziphakeme kakhulu.
Ukusebenza: Ingabe "ama-micropowders ahlakaniphile" azovela esikhathini esizayo? Isibonelo, ngezindawo eziguqulwe ngokukhethekile, angashintsha izici zokusika ngaphansi kwezimo ezithile, noma afinyelele ukuzilola, ukuzigcoba, noma eminye imisebenzi?
Ngakho-ke, naphezu kwemvelaphi yayo embonini yendabuko yokuhudula, i-alumina micropowder ensundu exutshwe kahle iye yashintsha kakhulu uma isingena emkhakheni wesimanje wama-semiconductor. Akuseyona "isando," kodwa "i-nanosurgical scalpel." Ubuso obubushelelezi ngokuphelele be-core chip kuyo yonke idivayisi kagesi ethuthukisiwe esiyisebenzisayo bukhona ngenxa yezinhlayiya ezincane ezingenakubalwa.
Lona umsebenzi omkhulu owenziwa emhlabeni wezinto ezincane kakhulu, futhii-alumina micropowder ensundu ehlanganisiwengokungangabazeki unguchwepheshe othule kodwa obalulekile kulo msebenzi.